Patterning of YBCO thin films by ion implantation and magneto-optical investigations

YB~,CLI,O,-~ thin films deposited by pulsed laser deposition were patterned by ion implantation. The pa~terning technique is based on the local disordering of the crystal structure due to elastic collisions of the imp1,mted 0'"-ions and thus . on a strong breakdown of superconductivity in the irradiated areas. With tkis patterning method circular and meandering structures with a size of 1 rnm were prepared for invesuga~ions regarding high current applications. Oi-ions with an energy of 180 keV were used to avoid a contamination of the film. The achieved structures were investigated concerning a dependence on the dose by means of RBS, XRD, A M and magneto-optical characterization. Using a fluence of 5 x 1 0 ' ~ O+/cm2 a fully planar and stable s~ructure can be obtained. The patterning depth can be adjusted by varying the implantation energy. So thjs technique was also used successfully on YBCO thin films covered already wi tll a 300 ntn Au lop layer. O 1998 Elsevier Science 8.V. PACS: 74.60.Mj; 74.75. + t: 85.70.Sq Kcp!,ords: Applica~ions of high-Tc superconduc~ors: ' h i 1 1 film; hadiation effects; Ion implanta~ion: Magneto-optical